| 摘要 |
PURPOSE: A wire bonding apparatus is provided to prevent vibration from being transferred, by making a moving unit properly guided while the moving unit can be locked in a wire bonding process. CONSTITUTION: A pair of gripper apparatuses hold the edge of a leadframe. The pair of gripper apparatuses are guided along a front rail(21) and a rear rail(22) which can approach each other or be separated from each other. The front and rear rails are mounted on a front moving unit(23) and a rear moving unit(24) which can approach each other or be separated from each other. One end of a guide(27) is fixed to a side of the front moving unit and the other end of the guide penetrates the rear moving unit. A roller(26) is installed in the rear moving unit, capable of rotating. A cylinder is installed in the rear moving unit. A cylinder rod extends or shrinks regarding the guide so that a contact part installed in the end of the cylinder rod can contact the guide. A driving unit makes the front and rear moving units approach each other or separated from each other.
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