| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film formation device having a film thickness measurement device equipped with a light receiving optical system capable of measuring a thickness in a desired position of a film body formed on a film formed body. SOLUTION: In this thin film formation device, a thin film is formed on the surface while the film thickness is measured by an optical method, while the film formed body is turned in a vacuum film formation camber. A light emitting optical system and a light receiving optical system of the thickness measurement device are made movable respectively. The light receiving optical system can be moved in a film formation range on the film formed body. The light emitting optical system is made movable corresponding to the movement of the light receiving optical system.
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