| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a triangular plate type static position monitor capable of reducing a beam position measurement error caused by reflection of a high- frequency signal at a terminal end of a beam mimic conductor upon calibration of a processing circuit output using the beam mimic conductor, and a calibration method thereof. SOLUTION: The triangular plate type static position monitor equipped with a pair of triangular plate type electrodes arranged in a vacuum duct, the portions opposite to each other along a traveling direction of a charged particle beam via a space, trough which the beam passes, of which are separated in a width-wise direction by a slit intersecting the traveling direction of the beam, and a processing circuit for converting voltage induced by the triangular plate type electrodes into a beam position information signal, wherein the portions 201, 202 of the triangular plate type electrodes arranged in opposition to each other have an anti-symmetrical from to each other. A resistance value of a terminal end resistance is set to a value that reflection of a high-frequency signal from a terminal end of a beam mimic conductor becomes minimum.</p> |
