| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a suction type ionizer which can realize a maintenance-free counter measure against contamination and also realize both improvement in yield and reduction in production cost. SOLUTION: The suction type ionizer is equipped with a suction tube 2 for sucking an external atmosphere through a suction port 2a, an emitter 1 arranged within the suction tube 2, a counter electrode 3 forming a high-voltage electric field with the emitter 1, and a voltage supplying part 4 for applying high voltage to the emitter 1, wherein ions formed are ejected out of the suction tube 2 by Coulomb force received from the high voltage electric field and caused to reach a substance 5 from which static charge is to be eliminated, and other foreign matter is sucked within the suction tube 2.</p> |
