| 摘要 |
PROBLEM TO BE SOLVED: To measure a leakage current form an electron beam on a real-time basis, since a change of a current value in an electron beam gives a big influence to the result of an exposure in an electron beam exposure device, and if there is a leakage current from the beam, the change of the current value possibly causes destruction of components and unexpected radiation of an X-ray, and an exposure device may be seriously damaged, to say nothing of stability of the electron beam. SOLUTION: In addition to the current value of the electron beam used for exposure, the value of the current leaked from the electron beam is measured, and is compared with a current value to be supplied on a real-time basis to grasp the leakage. As a method for implementing it, the leakage is measured in a power source to accelerate the electron beam discharged from a cathode.
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