HORIZONTALITY INSPECTION TOOL USED IN SEMICONDUCTOR FABRICATING PROCESS

摘要

PURPOSE: A horizontality inspection tool used in a semiconductor fabricating process is provided to check the horizontality of a wafer transfer arm or wafer stage, by installing a horizontality inspection unit on a disc-type plate like a wafer. CONSTITUTION: A disc-type plate(110) has the same type and size as the wafer. The horizontality inspection unit(120) is installed on the disc-type plate. The horizontality inspection unit includes the first bar-type horizontal gauge for inspecting the horizontality of an X axis and the second bar-type horizontal gauge for inspecting the horizontality of a Y axis.