THIN FILM TRANSISTOR ARRAY BOARD AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A thin film transistor array board and a method for manufacturing the same are provided to minimize manufacturing expenses by simplifying the manufacturing process. CONSTITUTION: A method for manufacturing a thin film transistor array board includes the steps of accumulating and patterning conductive materials for a pixel electrode and a gate wiring on an insulating board(10) in order to form a lower conductive film pattern including pixel electrodes(20) and an upper conductive film pattern including a gate wiring having a gate line(32) and a gate electrode(36); forming a gate insulating film pattern covering the gate wiring; forming a semiconductor pattern on the gate insulating film pattern; removing the upper conductive film pattern not covered by the gate insulating film pattern; forming a data wiring including a data line, a source electrode connected to the data lines, a drain electrode separated from the source electrode by patterning the conductive material for a data wiring; forming the gate insulating pattern and the semiconductor pattern by a photolithography using a photosensitive film pattern(112,114) having partially different thickness.