发明名称 MULTI-LAYERED MANGETOOPTIC ELEMENT AND ITS MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a multi-layered Faraday rotator which has a large Faraday rotational angle and high light transmissivity and its manufacturing method. SOLUTION: This manufacturing method for a multi-layered magnetooptic element has a process of forming a cyclic structure laminated base film by cyclically laminating on a transparent substrate a 1st dielectric material thin film which has a 1st refractive index and a 2nd dielectric material thin film which has a 2nd refractive index lower than the 1st refractive index, a 1st heat-treating process of heat-treating the cyclic structure laminated base film up to above temperature where the stress deformation of the cyclic structure laminated base film is removed, a process of laminating a magnetooptic material thin film on the heat-treated cyclic structure laminated base film, and a 2nd heat-treating process of heat-treating the magnetooptic material thin film for crystallization.</p>
申请公布号 JP2002303839(A) 申请公布日期 2002.10.18
申请号 JP20010104518 申请日期 2001.04.03
申请人 MITSUBISHI ELECTRIC CORP 发明人 TOKUNAGA TAKASHI;FUJII YOSHIO
分类号 G02F1/09;(IPC1-7):G02F1/09 主分类号 G02F1/09
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