METHOD AND APPARATUS FOR PRODUCING SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing semiconductor, with which the yield of a semiconductor can be improved by detecting the destruction of insulation on the dielectric film of an electrostatic chuck. SOLUTION: An electrostatic chuck device is provided with means 104A, 104B, 105A and 105B for measuring a voltage V to be impressed to electrodes 102A and 102B and a current I to flow on the dielectric film, when attaching an object 101 to be treated. Also, control means 109A and 109B decide a case that a resistance value R found by the voltage V and the current I or the absolute value of the current I is greater than a reference resistance value R0 or the absolute value of a current value I0 or greater than the resistance value R or current value I found the last time, and issues a warning.