METHOD OF MANUFACTURING DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To form plural patterns largely varying in processing accuracy without degrading productivity in forming a display device having a high function on a substrate of a super-large size. SOLUTION: The method of manufacturing the display device by forming a laminate of material layers of the prescribed patterns by a photolithography technique using a resist film on the surface of the substrate comprises forming the latent image of the resist film by combining both of a simultaneous exposure process using light and a direct drawing exposure process using an energy beam.