| 摘要 |
PROBLEM TO BE SOLVED: To provide an IC device-testing method and an IC device-testing system for inexpensively applying a laser beam different targets of a semiconductor IC device (DUT) to be inspected simultaneously in parallel, speedily successively without requiring any rematching in a microscope. SOLUTION: The method and the system test an integrated circuit (IC) by optical coupling. The optical system includes an optical fiber, a mounting tool, and a focusing element. Also, a channel for accommodating the optical system is provided at the mounting tool where the integrated circuit is mounted. The mounting tool operates as a heat sink. At least one photosensitive element/target on the IC is inspected by light being is guided so that light is focused on each target. By the light, data are latched by an IC that is operating under the influence of a test program, test pattern output is obtained from the IC, and it is judged whether the IC is in an appropriate operation state or not according to the test pattern output.
|
