发明名称 Verfahren zum gesteuerten Zuechten von kristallinen Schichten ternaerer Verbindungen aus Elementen der II. und VI. Spalte des Periodischen Systems der Elemente und Vorrichtung zur Durchfuehrung des Verfahrens
摘要 1282167 Semi-conductors INTERNATIONAL BUSINESS MACHINES CORP 2 Sept 1969 [27 Sept 1968] 43364/69 Heading H1K [Also in Division C7] A semi-conductor ternary film of elements of Groups II and VI is deposited on a crystal 16 by feeding vapours from sources 42, 43, 44 at a temperature which prevents binary growth. The substrate temperature is controlled by a heat sink 32. The substrate may be cleaned by backetching, and may be Hg-Te, Pb-Te, Sn-Te or Cd-Te. The film deposited may be Hg-Cd-Te, Zn-Cd-Te, Zn-Hg-Te, Hg-Cd-Se, Zn-Hg-Se, and Zn-Cd-Se.
申请公布号 DE1947382(A1) 申请公布日期 1970.04.16
申请号 DE19691947382 申请日期 1969.09.19
申请人 INTERNATIONAL BUSINESS MACHINES CORP. 发明人 RAYMOND CARPENTER,DONALD;WAYNE MANLEY,GERALD;STEVENSON MCDERMOTT,PHILIP;JAMES RILEY,RALPH
分类号 C30B23/02;C23C14/06;C30B25/02;C30B29/48;H01L21/365 主分类号 C30B23/02
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