EVACUATING ABILITY MONITORING METHOD, VACUUM TREATMENT METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To resolve a problem of a vacuum treatment device where treatment had to be stopped and pressure inside a vacuum treatment chamber had to be raised for monitoring evacuating ability. SOLUTION: Gas is introduced into the vacuum treatment chamber 1, a value of a pressure regulator opening is constantly acquired when a pressure setting value is provided to a pressure regulator 5, and an evacuating ability anomaly of the vacuum treatment device is detected by a change in the value.