发明名称 |
Semiconductor device having capacitor which assures sufficient capacity without requiring large space and method of producing the same |
摘要 |
In a semiconductor device comprising first and second layer wirings formed with a space left therebetween and a capacitor formed in the space and electrically connected to the first and the second layer wirings, the capacitor comprises a via electrically connected to one of the first and the second layer wirings, an electrode made of a conductive material and electrically connected to the one of the first and the second layer wirings through the via, and a dielectric film formed between the electrode and the other of the first and the second layer wirings.
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申请公布号 |
US2002149083(A1) |
申请公布日期 |
2002.10.17 |
申请号 |
US20020172121 |
申请日期 |
2002.06.14 |
申请人 |
KAWATA MASATO;KIKUTA KUNIKO |
发明人 |
KAWATA MASATO;KIKUTA KUNIKO |
分类号 |
H01L21/3205;H01L21/02;H01L21/768;H01L21/822;H01L23/52;H01L23/522;H01L27/04;(IPC1-7):H01L29/00 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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