Forming a dielectric layer by thermal decomposition of a metallo-organic material

摘要

A method of forming a dielectric layer on a substrate, including the steps of providing a metallo-organic material in a solvent, which dissolves such metallo-organic material; coating dissolved metallo-organic material onto the substrate to form a layer; and heating the deposited layer in an oxygen environment to produce thermal decomposition of the organic component of the dissolved metallo-organic material and a reaction of the metallic portion of the material with oxygen thereby causing the layer to become dielectric.