Angular velocity sensor uses measured capacitance variations between oscillation device subjected to angular velocity and cooperating measuring electrode

摘要

The sensor has a base (20) with an oscillation device (31) attached to it via a spring device (33,34). This allows an excitation oscillation to be transmitted in a first direction. A measuring oscillation is generated in a perpendicular direction when the oscillation device is subjected to an angular velocity, measured via the variations in the capacitance between a comb-shaped part (36) of the oscillation device and a facing measuring electrode (50) which can be made of a semiconductor material.