发明名称 INFRARED DETECTOR PACKAGED WITH IMPROVED ANTIREFLECTION ELEMENT
摘要 An infrared detector has a window in a cover having a cavity for exposing detector pixels to incident radiation. The window has an antireflective element formed within the cavity as a field of posts. The field of post structures is formed in a cavity by etching the posts in a desired pattern first, and forming the cavity by a general etch over the whole field afterward.
申请公布号 WO02054499(A3) 申请公布日期 2002.10.17
申请号 WO2001US50463 申请日期 2001.12.20
申请人 HONEYWELL INTERNATIONAL INC. 发明人 COLE, BARRETT, E.
分类号 G01J1/02;H01L27/146 主分类号 G01J1/02
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