发明名称 TERAHERTZ OPTICAL DEVICE AND ADJUSTMENT METHOD THEREFOR
摘要 <p>A terahertz optical system comprising a terahertz light generator, a terahertz light detector, and a beam splitter or the like disposed between them. A rotating mechanism can rotate the beam splitter to a first rotation position where a probe light is directed toward a detector and to a second rotation position where a probe light is directed toward a generator. Alignment between a curved-surface mirror and the detector is adjusted so that a probe light condenses onto a proper position on the detector in a first rotation position status. Alignment between the curved-surface mirror and the generator is adjusted so that a probe light condenses onto the terahertz pulse light generation point on the generator in a second rotation position status.</p>
申请公布号 WO02082060(A1) 申请公布日期 2002.10.17
申请号 WO2002JP03342 申请日期 2002.04.03
申请人 NIKON CORPORATION;TOCHIGI NIKON CORPORATION;USAMI, MAMORU 发明人 USAMI, MAMORU
分类号 G01J3/02;G01J1/08;G01N21/35;G01N21/3586;G01N22/00;G02B7/00;G02F1/35;(IPC1-7):G01N21/35;G01J1/06 主分类号 G01J3/02
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