发明名称 |
High-pressure processing apparatus |
摘要 |
A high-pressure processing apparatus for removing unnecessary matters on objects to be processed by bringing a high-pressure fluid and a chemical liquid other than the high-pressure fluid into contact with the objects to be processed in a pressurized state is provided with a plurality of high-pressure processing chambers, a common high-pressure fluid supply unit for supplying the high-pressure fluid to each one of the high-pressure processing chambers, a common chemical liquid supply unit for supplying the chemical liquid to the each high-pressure processing chambers, and a separating unit for separating gaseous components from a mixture of the high-pressure fluid and the chemical liquid discharged from the high-pressure processing chambers after the objects are processed. Thus, a high-pressure processing apparatus which has such a compact construction as to be partly installable in a clean room and can stably perform a high-pressure processing can be provided.
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申请公布号 |
US2002148492(A1) |
申请公布日期 |
2002.10.17 |
申请号 |
US20020123252 |
申请日期 |
2002.04.17 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO |
发明人 |
YAMAGATA MASAHIRO;OSHIBA HISANORI;SAKASHITA YOSHIHIKO;INOUE YOICHI;MURAOKA YUSUKE;SAITO KIMITSUGU;MIZOBATA IKUO;KITAKADO RYUJI |
分类号 |
H01L21/302;B08B3/02;B08B7/00;(IPC1-7):B08B3/00 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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