| 摘要 |
Disclosed is an optical element disposed in a container having an inside ambience independent from an outside of the container, and rinsed by irradiation with ultraviolet rays from a light source outside the container. Also disclosed is a rinsing method, having a first step for accommodating an article, to be rinsed, into a second container disposed inside a first container and being adapted to maintain an ambience different from that of the first container, a second step for introducing a rinsing gas into the second container, and a third step for irradiating the article with ultraviolet rays from a light source disposed inside the first container but outside the second container.
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