| 摘要 |
A non-volatile semiconductor memory capable of suppressing the occurrence of disturb failure during erase operation is provided by arranging as follows. Bit lines (BL) extend in the row direction of a matrix. Gate electrodes (9) are disposed on a channel region (CH). The non-volatile semiconductor memory comprises plugs (10) for connecting the gate electrodes (9) and word lines. The word lines at each row have two sub-word lines (WL). The first pair of sub-word lines (WL1a, WL1b) and the second pair of sub-word lines (WL2a, WL2b) belong to the same row, respectively. The first sub-word line of the first pair (WL1a) is in contact with first plugs (1012, 1014), the second sub-word line of the first pair (WL1b) is in contact with second plugs (1011, 1013), the first sub-word line of the second pair (WL2a) is in contact with third plugs (1022, 1024), and the second sub-word line of the second pair (WL2b) is in contact with fourth plugs (1021, 1023).
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