发明名称 |
Process for producing alternate striped electrode array in which transparent electrodes alternate with opaque electrodes, based on single mask designed for the opaque electrodes in self-aligned manner |
摘要 |
In a process for producing an alternate striped electrode array in which transparent electrodes alternate with opaque electrodes: the opaque electrodes are formed on a transparent base; a continuous, transparent conductive film is formed on the opaque electrodes and the transparent base; a continuous, negative resist film is formed on the transparent conductive film; a resist pattern corresponding to the opaque electrodes is formed by using the opaque electrodes as a mask and applying a predetermined type of electromagnetic radiation from the back surface of the transparent base to the negative resist film; and the transparent conductive film is etched by using the resist pattern as a mask so that a portion of the transparent conductive film which remains after the etching is separated from the opaque electrodes and forms the transparent electrodes.
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申请公布号 |
US2002148989(A1) |
申请公布日期 |
2002.10.17 |
申请号 |
US20020122186 |
申请日期 |
2002.04.16 |
申请人 |
FUJI PHOTO FILM CO., LTD. |
发明人 |
IMAI SHINJI |
分类号 |
G03F7/20;H01B13/00;H01L31/18;H04N1/00;(IPC1-7):H01L31/18 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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