发明名称 |
Optical substrate having alignment fiducials |
摘要 |
A process comprising: (a) applying a stop etch mask to a substrate, the mask defining the location on the substrate of a groove for receiving a waveguide and one or more fiducials for positioning the optical device on the substrate relative to the waveguide; and (b) etching the substrate to define the fiducials and the groove, the groove being dimensioned to receive at least a portion of a waveguide and the fiducials enabling the optical device to be positioned on the substrate such that it is optically aligned with the waveguide.
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申请公布号 |
US2002151181(A1) |
申请公布日期 |
2002.10.17 |
申请号 |
US20010974641 |
申请日期 |
2001.10.09 |
申请人 |
BOUDREAU ROBERT ADDISON;DRABENSTADT CHRISTIAN;SCHRAMM JEFFERY EMERSON |
发明人 |
BOUDREAU ROBERT ADDISON;DRABENSTADT CHRISTIAN;SCHRAMM JEFFERY EMERSON |
分类号 |
G02B6/42;H01L21/302;H01L21/461;(IPC1-7):H01L21/461 |
主分类号 |
G02B6/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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