| 摘要 |
The invention aims at suppressing an amount of deformation of a central portion of a movable part in a micro-miniature semiconductor actuator. A boundary portion (10) is provided between a central portion and an edge of a movable part (3), which is axially supported in a rotatable manner by torsion bars (4, 4) of an actuator (1), the boundary portion (10) being for suppressing transmission of a warp due to an influence of air resistance at the edge of the movable part (3) or moment of inertia, or heat generated by a driving force generating portion (6) at the edge of the movable part, to a central portion of the movable part, to suppress deformation of the central portion of the movable part.
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