发明名称 METALLIZATION METHODS USING FOILS
摘要 A system and method for filling a plurality of closely-spaced apart recesses to form a high-density pattern in the surface of a substrate. The metallization system and process includes providing a substrate, which includes a first surface defining a plurality of recesses; overlaying a resistive foil on the first surface; and subjecting the substrate to a pressure to cause said resistive foil to enter said plurality of recesses.
申请公布号 WO02082508(A1) 申请公布日期 2002.10.17
申请号 WO2002US10944 申请日期 2002.04.04
申请人 WAFERMASTERS, INCORPORATED 发明人 YOO, WOO, SIK
分类号 H01L21/00;H01L21/768 主分类号 H01L21/00
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