MATERIAL SENSOR WITH PROTECTIVE LAYER

摘要

A sensor for measuring the concentration of a material in a gas or a fluid, in particular a humidity sensor, is arranged on a semiconductor substrate (1). A measuring layer (4) is arranged on the substrate (1) the properties of which are dependant upon the concentration to be measured. A protective layer (5) is arranged over the measuring layer, which at least partially comprises a polymer, permeable to the material to be measured, preferably a polyorganosiloxane. An improvement in working life, in particular in corrosive environments may be achieved by means of the protective layer.