MULTI-CHANNEL TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR PROCESSING FACILITIES

摘要

A temperature control system (100) for multiple semiconductor processing facility components (120, 122) includes a common cooling unit (102) for controlling the temperature of a cooling fluid in fluid communication with multiple remote temperature control modules (114) that separately control the temperature of the multiple process components (120, 122). Each remote temperature control module (114) includes a circulation loop for the cooling received from the common cooling unit (102) and a circulation loop for a heat transfer fluid received from the corresponding process component (120, 122). A heat exchanger (348) within each remote temperature control module (114) transfers heat from the heat transfer fluid to the cooling fluid. A heat source (362) may be included within each remote temperature control module (114) for heating the heat transfer fluid. The cooling unit (102) may be a refrigeration unit (402) providing compressed refrigerant to the remote temperature control modules (114).