| 摘要 |
<p>An inspection method for detecting a defect of an object, if any, comprises producing fine particles, causing the fine particles to enter the object, and allowing a high-directivity light beam to pass near the object so as to irradiate the fine particles emerging from the object with the light beam to visualize and detect a defect, if any. Also disclosed is an inspection device for detecting a defect of an object, if any, comprises fine particle producing means for producing fine particles, fine particle directing means for causing the fine particles to enter the object, and light emitting means for emitting a high-directivity light so that the light beam may pass near the object and irradiate the fine particles passing through and emerging from the object so as to visualize the fine particles. It is possible to detect a defect of the object sensitively, if any, to locate and record the place of the defect easily and to shorten or eliminate the inspection time and the pre- and post-process times before and after the inspection.</p> |
