发明名称 Interferometrische Messvorrichtung
摘要 The invention relates to an interferometric measuring device for measuring the surface or boundary surface of an object of measurement (O). The aim of the invention is to prevent vibrations from influencing the result of measurement. To this end, a connecting unit (VE) is provided which directly links, in a mechanically rigid and detachable manner, the object of measurement (O) with at least one section of the measuring device associated with the object of measurement (O).
申请公布号 DE10123844(A1) 申请公布日期 2002.10.17
申请号 DE2001123844 申请日期 2001.05.16
申请人 ROBERT BOSCH GMBH 发明人 LINDNER, MICHAEL
分类号 G01B9/02;(IPC1-7):G01B9/02;G01B11/30;G01B11/24 主分类号 G01B9/02
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