| 发明名称 |
Heater member for mounting heating object and substrate processing apparatus using the same |
| 摘要 |
<p>The heater member has at least a part of a surface other than a surface mounting an object of heating mirror-finished. At least a part of a surface opposite to the surface mounting the object of heating is mirror-finished. An independent claim is also included for the following: (a) a substrate processing apparatus.</p> |
| 申请公布号 |
EP1249858(A2) |
申请公布日期 |
2002.10.16 |
| 申请号 |
EP20020252559 |
申请日期 |
2002.04.10 |
| 申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NATSUHARA, MASUHIRO;NAKATA, HIROHIKO;KUIBIRA, AKIRA;SHINMA, KENJI |
| 分类号 |
H01L21/683;H01L21/00;H01L21/027;H01L21/68;H01L21/687;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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