| 摘要 |
In an apparatus comprising an inspection jig 10 including a sample mounting portion 11 for mounting a sample 1, a vibrator 22 for applying vibration to the sample 1 and a sound collector 20 for collecting a vibration sound when the vibration is applied to the sample 1 by the vibrator 22, and a sound detector 30 for conducting frequency analysis of the vibration sound collected by the sound collector 20, the defects of the sample are determined by sampling and analyzing the vibration sound when the vibration is applied to the sample 1 by the vibrator 22 on the time series.
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