| 摘要 |
A position detection device for detecting position information of a photosensitive substrate when performing projection exposure of a pattern on a surface of an object onto the photosensitive substrate, via a projection optical system, by scanning the pattern includes a device for detecting the position information within a shot region of the photosensitive substrate in the projection optical system, and a device for causing the detection device to detect the position information at a plurality of points arranged so that a first end of the plurality of points coincides with a position to start a scanning exposure and a second end of the plurality of points coincides with a position to end the scanning exposure, in accordance with a size of the shot region. |
