发明名称 Non-isothermal electromigration testing of microelectronic packaging interconnects
摘要 A method for measuring electromigration includes the steps of measuring a corresponding voltage increase across an interconnect as a function of time for a plurality of nonzero heating rates and calculating an interconnect integrity from the voltage increase.
申请公布号 US6466038(B1) 申请公布日期 2002.10.15
申请号 US20000727427 申请日期 2000.11.30
申请人 LSI LOGIC CORPORATION 发明人 PEKIN SENOL;PATEL SUNIL A.
分类号 G01R31/28;(IPC1-7):G01R31/26 主分类号 G01R31/28
代理机构 代理人
主权项
地址