发明名称 Electronic component and method of manufacturing
摘要 A method of manufacturing an electronic component includes forming first, second, and third capacitors (260, 270, 280) and electrically testing the first, second, and third capacitors to characterize an etch process for a sacrificial layer. Each of the first, second, and third capacitors has different amounts of first and second electrically insulative materials.
申请公布号 US6465320(B1) 申请公布日期 2002.10.15
申请号 US20000595090 申请日期 2000.06.16
申请人 MOTOROLA, INC. 发明人 MCNEIL ANDREW C.;KOURY, JR. DANIEL;GOGOI BISHNU P.
分类号 H01L21/02;H01L21/311;H01L23/544;(IPC1-7):H01L21/20 主分类号 H01L21/02
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