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摘要
申请公布号
JP3333863(B2)
申请公布日期
2002.10.15
申请号
JP19950205598
申请日期
1995.08.11
申请人
发明人
分类号
H01L29/73;H01L21/331;H01L21/8228;H01L27/082;H01L29/732;(IPC1-7):H01L21/822
主分类号
H01L29/73
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