Installation for measuring pressure inside vacuum pipeline

摘要

An installation for measuring pressure along a pipeline. The installation includes a control valve between a vacuum gauge and a pipe section attached to the pipeline. Relying on open and close signals from a main valve, the control valve is opened and closed accordingly. The control valve is shut when the reaction chamber of a processing station is undergoing an operation. Since volatile emission from the chamber is prevented from reaching the interior surface of the vacuum gauge to form a coated layer, shifting of measured pressure is avoided and working life of the vacuum gauge is extended.