FLUID CONTROL APPARATUS AND GAS TREATMENT SYSTEM COMPRISING SAME
摘要
<p>A fluid control apparatus comprises lines A1, A2, A3, A4, A5, B1, B2, B3 each removably attached to a substrate 1 by a plurality of brackets 8, 9, 18, 19, 20, and channel communication means 47, 48 which are removable upward. <IMAGE></p>
