| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a treater treating circuit members such as a multilayer substrate with supercritical water. SOLUTION: A multilayer substrate 2 is reacted with supercritical water in the inside of a reaction chamber 14 being a hollow elongated ellipsoid cylinder having a cross section of an elongated ellipse composed of small-curvature and nearly linear central parts and large-curvature ends, so that the central parts of the chamber 14 are suited for the entrance of the flat object such as the substrate 2. Further, the ends have a large curvature and serve to increase the surface area of the inside of the chamber 14, so that the chamber 14 can withstand to such a high pressure even if the pressure in the chamber 14 is high.</p> |
