发明名称 Apparatus for measuring electric charge
摘要 An apparatus for measuring an electrostatic charge includes a conductive plate a voltage source a first switch for connecting the conductive plate to the voltage source or to the ground potential and an insulator membrane arranged on the conductive plate upon a sample element is to be placed. A conductive grounded plate is arranged parallel to the conductive plate, and a conductive probe is secured to the grounded plate through an insulator material for picking up the electrostatic charge induced in the sample element from the surface of the sample element. A coulomb meter with a first electrode is connected to the grounded plate for indicating the quantity of the electrostatic charge. Completing the apparatus is a second switch for connecting the probe to the second electrode of the coulomb meter or the grounded plate.
申请公布号 US6466027(B1) 申请公布日期 2002.10.15
申请号 US20000691588 申请日期 2000.10.18
申请人 NEC CORPORATION 发明人 SUZUKI KOUICHI
分类号 G01R31/26;G01R1/06;G01R29/24;H01L21/66;(IPC1-7):G01R29/12;G01R31/302 主分类号 G01R31/26
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