OPTICAL SCANNING PROBE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical scanning probe device obtaining an observation image of a desired part to be inspected along its depth. SOLUTION: An optical fiber 6b through which light from a light source is transmitted so that the light is emitted from the end face of the fiber is passed through an optical probe inserted in a coelom and light is collectively applied to a specimen part 13 via the optical system of an optical unit 11 provided inside an end frame 10 which constitutes the tip part 9 of the optical probe. By driving movable mirrors 17 and 18 to scan the focus 23 of the light over a scanned surface 25, a confocal microscopic image can be obtained. An end cover 12 is attached to the frame 10 via a piezoelectric element 28 and made movable in the depth direction 29 of the specimen part 13. By moving the focus 23 in that direction 29, a confocal microscopic image at the desired depth can be obtained.