| 摘要 |
PROBLEM TO BE SOLVED: To increase the ability of an ejector for discharging practical size ink jet splashes without reducing the ejector dimension nor increasing the film thickness. SOLUTION: This method of manufacturing a microelectronic mechanical liquid ejector includes a step for providing a substrate having an insulating layer, a conductive layer, a sacrifice layer and a second conductive layer, a step for patterning the second conductive layer with a series of holes, a step for depositing a second sacrifice layer onto the second conductive layer, a step for patterning the second sacrifice layer with a radial grid pattern or the like, a step for filling the second conductive layer with this pattern, a step for depositing a third conductive layer 3 to be brought in contact with the second conductive layer, a step for dipping this structure with the free corrosion liquid to eliminate the first and the second sacrifice layers.
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