| 发明名称 |
Vacuum processing system for work piece |
| 摘要 |
A work piece batch (5a,5b) is accommodated in vacuum processing station (3a,3b). Then surface treatment of the workpiece as a batch is carried out collectively in at least one of the vacuum processing stations. A process controller (7) programs the process timing, freely.
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| 申请公布号 |
CH692741(A5) |
申请公布日期 |
2002.10.15 |
| 申请号 |
CH19970001653 |
申请日期 |
1997.07.08 |
| 申请人 |
UNAXIS TRADING LTD. C/O BALZERS AG |
发明人 |
WAGNER RUDOLF;PERRIN JEROME;SCHMITT, JACQUES |
| 分类号 |
C23C14/54;C23C14/56;C23C16/54;H01L21/02;(IPC1-7):C23C16/52;B01J3/02;B65G49/00 |
主分类号 |
C23C14/54 |
| 代理机构 |
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代理人 |
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