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摘要
申请公布号
JP3335417(B2)
申请公布日期
2002.10.15
申请号
JP19930090745
申请日期
1993.03.25
申请人
发明人
分类号
H01L21/285;H01L21/28;H01L21/3205;H01L21/768;H01L23/52;(IPC1-7):H01L21/768
主分类号
H01L21/285
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