发明名称 Heat lamps for zone heating
摘要 A reactor chamber is positioned between a top array of heat lamps and a bottom array of heat lamps. At least one of the heat lamps forming the top and bottom arrays features a segmented filament such that power output along the length of the heat lamp differs. In one configuration, the heat lamp has a pair of high energy output regions spaced from each other by a lower energy output region. In some configurations, at least one of the heat lamps forming the top and bottom arrays is non-linear, such as U-shaped. In further configurations, a non-linear heat lamp has a segmented filament with segments or areas of different winding density.
申请公布号 US6465761(B2) 申请公布日期 2002.10.15
申请号 US20010911212 申请日期 2001.07.23
申请人 ASM AMERICA, INC. 发明人 STEVENS RONALD R.;SHERO ERIC;AGGARWAL RAVINDER K.;HALPIN MICHAEL W.
分类号 H05B3/10;C23C16/44;C23C16/46;C23C16/48;H01L21/205;H05B3/44;(IPC1-7):F27B5/14 主分类号 H05B3/10
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