发明名称
摘要 An optical element includes a first substrate having a diffractive surface or a surface structure with a surface level difference, a second substrate for covering the diffractive surface or the surface structure to provide a shield therefor, and a groove provided at the diffractive surface or the surface structure, and extending from a central portion to a peripheral portion thereof, for discharging or replacing a gas at the diffractive surface or the surface structure therethrough.
申请公布号 JP3335134(B2) 申请公布日期 2002.10.15
申请号 JP19990082500 申请日期 1999.03.25
申请人 发明人
分类号 H01L21/027;G02B3/08;G02B5/18;G03F7/20;(IPC1-7):G02B5/18 主分类号 H01L21/027
代理机构 代理人
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