发明名称 |
Micro-fabricated shielded conductors |
摘要 |
A microstructure that may be used as an electrical connection in a microfabricated electro-mechanical system (MEMS) apparatus. The microstructure may have one or more isolatable electrical connections for signal transmission. The microstructure allows a MEMS apparatus to shield signal transmissions from the effects of electromagnetic interference or conductive fluids.
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申请公布号 |
US6465856(B2) |
申请公布日期 |
2002.10.15 |
申请号 |
US20010812498 |
申请日期 |
2001.03.19 |
申请人 |
XEROX CORPORATION |
发明人 |
GULVIN PETER M.;CHEN JINGKUANG |
分类号 |
B41J2/045;B41J2/055;B41J2/16;B81B7/00;(IPC1-7):H01L29/82 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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