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发明名称
TRANSVERSAL MODE PIEZOELECTRIC ACTUATOR
摘要
申请公布号
SG91811(A1)
申请公布日期
2002.10.15
申请号
SG19990001297
申请日期
1999.03.13
申请人
DATA STORAGE INSTITUTE;NANYANG TECHNOLOGICAL UNIVERSITY;XIAN JIAOTONG UNIVERSITY;SHANGHAI INSTITUTE OF CERAMICS
发明人
YIN QING RUI;LI GUORONG;CHEN DAREN;HUANG TONY;YAO XI;ZHU WEI GUANG
分类号
H01L41/083;H01L41/09;(IPC1-7):H01L41/083
主分类号
H01L41/083
代理机构
代理人
主权项
地址
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