发明名称 PROTECTIVE FILM AND METHOD FOR PREPARING SAME
摘要 <p>A high-quality protective film for a dry film resist is provided. A film of a polyethylene is used as the protective film, the polyethylene being prepared by pressurizing ethylene with use of an ultra-high pressure compressor and then polymerizing the ethylene at a reaction temperature of 190° to 300° C. and a reaction pressure of not lower than 167 MPa in the presence of a radical polymerization initiator, or by pressuring ethylene with use of an ultra-high pressure compressor and then polymerizing the ethylene at a reaction temperature of 190° to 300° C. in the presence of a radical polymerization initiator while allowing a radical polymerization inhibitor to be present in the reaction system.</p>
申请公布号 SG91889(A1) 申请公布日期 2002.10.15
申请号 SG20000006613 申请日期 2000.11.15
申请人 JAPAN POLYOLEFINS CO., LTD. 发明人 KATSUAKI TSUTSUMI;ISAO HASHIMOTO
分类号 G03F7/004;B32B27/32;C08F2/01;C08F2/38;C08F2/42;C08F10/02;C08J5/18;G03C1/053;G03F7/11;(IPC1-7):C08F10/02;C08F110/02 主分类号 G03F7/004
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