PULSING INTELLIGENT RF MODULATION CONTROLLER

摘要

PURPOSE: A pulsing intelligent RF modulation controller is provided to control a generator power output by supplying output signal having setting time in real time. CONSTITUTION: The plasma generator(10) includes a system controller(14) for generating control signals and processing monitoring and fault signals. An external interface(16) is connected to the system controller(14) through an interface bus for communicating information with external equipment or users. A driver(18) connected to the system controller(14) generates buffered drive signals corresponding to the control signals. The drive signals drive a modulator(20) that converts rectified line power to an unfiltered output. The unfiltered output is coupled to an output assembly(22) that includes an output filter(24) and a detector(26). The unfiltered output is filtered by the output filter(24) to generate the power output(12). The detector(26) generates a sense signal that corresponds to at least one signal characteristic of the output voltage(12).