SWING MOTOR AND STAGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a swing motor (aθmotor) which prevents decrease of the torque and makes the dimension in the longitudinal direction small, and a stage device having the swing motor. SOLUTION: In the swing motor, a carriage 11θand coils 6θare rotatably disposed interposing a sliding support member 16θto a center axis 9, and the carriage is rotated by energizing the coil disposing a plurality of permanent magnets 2θwhose magnetic air gap faces the coils. The plurality of permanent magnets are disposed over a prescribed angle of not more than 360 degrees taking the center axis as the center, and wiring 19 to the coils is disposed in the range except the angle.